Micro Electro Mechanical Systems design
Course Name:
MC706 Micro Electro Mechanical Systems design
Programme:
M.Tech (Mechatronics Engineering)
Semester:
First
Category:
Programme Core (PC)
Credits (L-T-P):
(3-0-0) 3
Content:
MEMS overview and working, Design and manufacturing of electromechanical systems, Application of MEMS in automotive and medical electronics, Materials in MEMS, different manufacturing process and its comparison, Micro system design and CAD application in design.
References:
Tai Ran Hsu, MEMS and Microsystems- Design and manufacturing Tata McGraw Hill Marc J. Madou, Fundamentals of microfabrication
Department:
Mechanical Engineering