Micro Electro Mechanical Systems
Course Name:
MF806 Micro Electro Mechanical Systems
Programme:
M.Tech (Manufacturing Engineering)
Category:
Open Electives (OE)
Credits (L-T-P):
(3-0-0)3
Content:
MEMS - overview and working, Sensors, Transducers and Actuators, Design and manufacturing of electromechanical systems, Application of MEMS in automotive and Medical Electronics, Basics of MEMs
Engineering, Scaling Laws, Materials for MEMS, Microsystem manufacturing - Photolithography, Bulk, surface and LIGA processes, Comparison of Processes, Wet and Dry Etching, Stiction, Method to Reduce Stiction,
Microsystem Design, CAD applications in MEMS Design
References:
Tai Ran Hsu, MEMS and Microsystems - Design and Manufacture, Tata McGraw-Hill, 2002 Marc J. Madou, Fundamentals of Microfabrication, The science of miniaturization, IEEE press Stephen D Senturia, Microsystem Design, Kluwer Academic Pub, 2003
Department:
Mechanical Engineering