Micro Electro Mechanical Systems
Course Name:
DP 805 MICRO ELECTRO MECHANICAL SYSTEMS
Programme:
M.Tech (Design and Precision Engineering)
Category:
Elective Courses (Ele)
Credits (L-T-P):
(3-0-0)
Content:
Introduction, History, Development and need of Micro-Electro-Mechanical Systems. Overview of MEMS technology,Different electro-physical processes used for machining - dealing with MEMS materials; relevant non-conventional processes; IC fabrication processes used for MEMS; MEMS sensors and actuators; Mechanical process techniques and process models for micromachining; Fabrication processes and design of the process sequences; Agile Prototyping of design and manufacturing processes in micro-machining and computer based design; Reliability and process control of micro manufacturing processes; Introduction and exposure to nanotechnology processes and systems.
References:
Julian W. Gardner, Microsensors - Principles and Applications, John Wiley and Sons, Inc., NY, 1994.
Ljubisa Ristic (ed.), Sensor Technology and Devices, Artech House, MA, 1994.
Randy Frank, Understanding Smart Sensors, second ed., Artech House, MA, 2000.
Iwao Fujimasa, Micromachines - A New Era in Mechanical Engineering, Oxford University Press, NY, 1996.
S.M. Sze (ed.), Semiconductor Sensors, John Wiley and Sons, Inc., NY, 1994.
Sergej Fatikow and Ulrich Rembold, Microsystem Technology and Microrobotics, Springer Verlag, NY, 1997.
Department:
Mechanical Engineering