Manufacturing and Design of MEMS
Course Name:
ME325 MANUFACTURING AND DESIGN OF MEMS
Programme:
B.Tech (Mechanical)
Semester:
Sixth
Category:
Programme Specific Electives (PSE)
Credits (L-T-P):
(3-0-0)3
Content:
Introduction to electromechanical systems and MEMS, Micro sensors and Micro actuators, Scaling and Material Issues, Micro fabrication techniques, Electro mechanics, Design of MEMS and Design realization tools. Packaging of MEMS.
References:
J J Allen, MEMS Design, Taylor and Francis 2005
Tai Ran Hsu, MEMS and Microsystems-Design and Manufacture, TMH 2002 Nadim Maluf, An Introductionn to MEMS Engg, Artech House 2004
Stephen D Senturia, Microsystem Design, Springer 2001
Marc J Madou, Fundamentals of Microfabrication, CRC Press 2nd Ed 2002 Menz, Mohr and Paul, Microsystem Technology, Wiley VCH 2001
Department:
Mechanical Engineering