Microsystem Technology
Course Name:
ME 442 MICROSYSTEM TECHNOLOGY
Programme:
B.Tech (Mechanical)
Semester:
Eighth
Category:
Open Electives (OE)
Credits (L-T-P):
(3-0-0) 3
Content:
Introduction to micro system elements, sensor and actuator fundamentals, scaling issues and materials for micro systems, micromachining, design and analysis of micro systems, CAD approach, micro system packaging.
References:
W. Menz, J. Mohr and O. Paul, Microsystem Technology, Wiley, 2001.
Stephen D. Senturia, Microsystem Design, Springer, 2001.
Mark J Madou, Fundamentals of Microfabrication, CRC Press, 2002.
Department:
Mechanical Engineering