Microsystem Technology

Course Name: 

ME 442 MICROSYSTEM TECHNOLOGY

Programme: 

B.Tech (Mechanical)

Semester: 

Eighth

Category: 

Open Electives (OE)

Credits (L-T-P): 

(3-0-0) 3

Content: 

Introduction to micro system elements, sensor and actuator fundamentals, scaling issues and materials for micro systems, micromachining, design and analysis of micro systems, CAD approach, micro system packaging.

References: 

W. Menz, J. Mohr and O. Paul, Microsystem Technology, Wiley, 2001. Stephen D. Senturia, Microsystem Design, Springer, 2001. Mark J Madou, Fundamentals of Microfabrication, CRC Press, 2002.

Department: 

Mechanical Engineering
 

Contact us

Dr. Narendranath S, Professor and Head
Department of Mechanical Engineering, NITK, Surathkal
P. O. Srinivasnagar, Mangalore - 575 025
Karnataka, India.

  • Hot line: +91-0824-2473049

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