Manufacturing and Design of MEMS

Course Name: 

ME325 MANUFACTURING AND DESIGN OF MEMS

Programme: 

B.Tech (Mechanical)

Semester: 

Sixth

Category: 

Programme Specific Electives (PSE)

Credits (L-T-P): 

(3-0-0)3

Content: 

Introduction to electromechanical systems and MEMS, Micro sensors and Micro actuators, Scaling and Material Issues, Micro fabrication techniques, Electro mechanics, Design of MEMS and Design realization tools. Packaging of MEMS.

References: 

J J Allen, MEMS Design, Taylor and Francis 2005 Tai Ran Hsu, MEMS and Microsystems-Design and Manufacture, TMH 2002 Nadim Maluf, An Introductionn to MEMS Engg, Artech House 2004 Stephen D Senturia, Microsystem Design, Springer 2001 Marc J Madou, Fundamentals of Microfabrication, CRC Press 2nd Ed 2002 Menz, Mohr and Paul, Microsystem Technology, Wiley VCH 2001

Department: 

Mechanical Engineering
 

Contact us

Dr. Narendranath S, Professor and Head
Department of Mechanical Engineering, NITK, Surathkal
P. O. Srinivasnagar, Mangalore - 575 025
Karnataka, India.

  • Hot line: +91-0824-2473049

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